CMOS Plane Position Measurements Through Glass Window Cover  


Executive Summary

Optimet's NanoConoProbe with a 25mm lens was used in sensor plane position measurements. NanoConoProbe is most suitable for this application. The effective working range is 100µm due to the 1mm working range of the sensor and the overall dimensions (0.9mm) of the specific sample (top glass surface to the die surface). Measurements results fit sensor manufacturer specifications in terms of glass thickness and distances.   The features measured include:
  • Distance from NanoConoProbe plane to sensor's die plane
  • Glass window cover thickness
  • Distance between bottom glass surface to the sensing plane
  • Sensing plane angle  


1. Optimet's Advantages over Other Technologies:

Optimet's NanoConoProbe has interchangeable lenses from 16mm to 75mm focal length providing an optimal working range for each sample.

2.Application Description

Measurements of 2D detector die surface through cover glass window (fig.1). Top levels of the glass to the die level tolerances are between 0.746 – 1.178mm
2.1 Test Objective
Measuring the 2D sensor die plane surface position through its cover glass window. 2.2 Method
Scanned Micron detector MT9V403 (fig. 2) with NanoConoProbe 25mm lens objective






The power spectrum (fig. 5) shows the three signals, collected by the sensor, reflected from both sides of the glass cover and from die surface.

4. Data

Parameter Value
Reflective/Diffusive/Transparent/Translucent Reflective
Working Range (mm) 1
Precision (µm) 0.5
Stand Off (mm) 16
Max. Data Rate (KHz) 3
Lateral Resolution  10*100 µm
Z Resolution  -
Application Category  ‐ 



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